JPS6152111U - - Google Patents
Info
- Publication number
- JPS6152111U JPS6152111U JP13603784U JP13603784U JPS6152111U JP S6152111 U JPS6152111 U JP S6152111U JP 13603784 U JP13603784 U JP 13603784U JP 13603784 U JP13603784 U JP 13603784U JP S6152111 U JPS6152111 U JP S6152111U
- Authority
- JP
- Japan
- Prior art keywords
- heating element
- planar heating
- mounting base
- attached
- top plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010438 heat treatment Methods 0.000 claims description 4
- 239000012212 insulator Substances 0.000 claims description 2
- 239000000919 ceramic Substances 0.000 claims 1
- 238000005485 electric heating Methods 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
Landscapes
- Surface Heating Bodies (AREA)
- Resistance Heating (AREA)
- Electric Stoves And Ranges (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984136037U JPH0414879Y2 (en]) | 1984-09-07 | 1984-09-07 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1984136037U JPH0414879Y2 (en]) | 1984-09-07 | 1984-09-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6152111U true JPS6152111U (en]) | 1986-04-08 |
| JPH0414879Y2 JPH0414879Y2 (en]) | 1992-04-03 |
Family
ID=30694514
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1984136037U Expired JPH0414879Y2 (en]) | 1984-09-07 | 1984-09-07 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0414879Y2 (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001084623A1 (fr) * | 2000-05-01 | 2001-11-08 | Ibiden Co., Ltd. | Unite de plaque chauffante et dispositif de production et de controle de semi-conducteurs |
| JP2002025756A (ja) * | 2000-07-04 | 2002-01-25 | Ibiden Co Ltd | 半導体製造・検査装置用ホットプレート |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52132438A (en) * | 1976-04-23 | 1977-11-07 | Toshiba Corp | Exothermic device |
-
1984
- 1984-09-07 JP JP1984136037U patent/JPH0414879Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52132438A (en) * | 1976-04-23 | 1977-11-07 | Toshiba Corp | Exothermic device |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001084623A1 (fr) * | 2000-05-01 | 2001-11-08 | Ibiden Co., Ltd. | Unite de plaque chauffante et dispositif de production et de controle de semi-conducteurs |
| JP2002025756A (ja) * | 2000-07-04 | 2002-01-25 | Ibiden Co Ltd | 半導体製造・検査装置用ホットプレート |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0414879Y2 (en]) | 1992-04-03 |